Axcelis Technologies servo motor and drive repairs and replacements

Expert Axcelis Machines Servo Motor Repairs and Replacements.

Axcelis Technologies is a world leader in capital equipment for the semiconductor manufacturing industry. The company specializes in ion implantation systems, including high and medium current implanters, high-energy implanters, and curing systems used in semiconductor chip fabrication.

For over 20 years, Potomac Electric has proudly supported Axcelis end-users by repairing and refurbishing hundreds of Axcelis servo motors and drives. In addition to repairs, we design and manufacture replacement motors and drives for Axcelis equipment, including:

• Axcelis ion implanters
• Axcelis GSD series

Axcelis Servo Motor and Drive Repairs & Replacements

We specialize in repairing and replacing AC Brushless Direct Drive System motors and drives for Axcelis GSD implanters, including:

• Axcelis part number 2300160C (AC Brushless Direct Drive System motor and drive)
• Axcelis part number 1215000 (Brushless motor)
• Axcelis part number 55S0025C (Sanyo Denki black motor)
• Axcelis part number 4700-0041-001 (Baldor motor)
• Ball screws for Axcelis GSD implanters

Our mission is to help customers save money by maintaining and extending the life of older Axcelis equipment. We continuously develop replacement solutions for obsolete or high-cost parts and will update our list as new replacements become available. The table below shows servo motors for which we currently have replacements.

Need Axcelis servo motor repairs or replacements? Contact us through our Inquiry and Quotes page. 

Looking for specific Axcelis parts? Many Axcelis servo motors and drives may be available in our Parts Inventory—reach out for small-lot production needs.