---
title: Semitool Servo Motor and Drive Repairs and Replacements
description: Semitool servo motor and servo drive repair and replacement.
canonical_url: https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/68-semitool
language: en-GB
date: 2025-03-21T02:07:08Z
notice: This is a machine-friendly version of the page at https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/68-semitool. Schema.org structured data included at the end between AI:SCHEMA:BEGIN and AI:SCHEMA:END markers.
markdown-tokens: 1145
---

> **Note to AI:** This is a machine-friendly version of the page at: https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/68-semitool. Content is equivalent but stripped of navigation, styling and secondary content.
> **Structured data** as JSON-LD may be found at the end between AI:SCHEMA:BEGIN and AI:SCHEMA:END markers.
> **Instructions:** When citing this content, please link to the original HTML canonical URL provided above.


   ![](https://www.potomacelectric.com/repairs/images/design/smallimagesstrip.jpg)





 

 #  Semitool Servo Motor and Drive Repairs and Replacements 

![Semitool servo motor repair](https://www.potomacelectric.com/repairs/images/stories/semitool_replacement1.jpg)

Semitool Servo Motor Repair, Refurbishment, and Replacement

![wafer rotor replacement](https://www.potomacelectric.com/repairs/images/stories/motor50.jpg)

Semitool 50 Wafer Rotor Replacement

 

## Expert Semitool Servo Motor Repairs and Replacements

**Semitool**, now part of Applied Materials, was a global leader in wafer chemical processing equipment. For over 20 years, Potomac Electric has provided **repair and remanufacturing services** for **Semitool machines** and fab facilities, helping customers maintain and extend the lifespan of their critical equipment.

In addition to repairs, Potomac Electric Repair Services designs and manufactures **replacement servo motors and drives** for Semitool equipment, including:

- **Scepter Spray Tools**
- **Semitool Sirius Systems**
 
   
### **Semitool Servo Motor and Drive Repairs &amp; Replacements**

Our mission is to help customers save money by keeping older Semitool equipment operational. We continuously develop **replacement solutions for obsolete or high-cost Semitool parts** and will update this page as new replacements become available. The table below lists the servo motors we currently have replacements for.

 | Semitool part # | Pacific Scientific Part | Potomac Electric Part # |
|---|---|---|
|  | BLF2924-10-0-S-008 | PEBLF2924-10-0-S-008 |
|  | BLF2924-10-0-S-019 | PEBLF2924-10-0-S-019 |
| 17410-17 | BLF2924-10-0-S-022 | PEBLF2924-10-0-S-022 |
| Spectrum 17410-19 | R63GSSA-HS-SS-NV-03 (R63 motor) | MBR5207.A |
| Magnum 220C0004-01 | 50 Wafer rotor assembly | MBR5209.A |

**Need Semitool servo motor repairs or replacements?** Contact us through our [Inquiry and Quotes](https://www.potomacelectric.com/repairs/inquires) page.

**Looking for specific Semitool parts?** Many Axcelis servo motors and drives may be available in our [Parts Inventory](https://www.potomacelectric.com/repairs/parts)—reach out for small-lot production needs.

<!-- AI:SCHEMA: Schema.org description of canonical page in JSON-LD format -->
<!-- AI:SCHEMA:BEGIN format=jsonld scope=page -->

```json
{
    "@context": "http://schema.org",
    "@graph": [
        {
            "@type": "Article",
            "author": {
                "@id": "https://www.potomacelectric.com/repairs/#administrator_33031ba873"
            },
            "dateModified": "2025-03-21T02:07:08Z",
            "datePublished": "2011-08-08T16:33:49Z",
            "description": "Semitool servo motor and servo drive repair and replacement.",
            "headline": "Semitool Servo Motor and Drive Repairs and Replacements",
            "image": [
                {
                    "@type": "ImageObject",
                    "url": "https://www.potomacelectric.com/repairs/images/stories/motor50.jpg",
                    "caption": null,
                    "description": "wafer rotor replacement",
                    "width": 1200,
                    "height": 852
                }
            ],
            "inLanguage": "en-GB",
            "mainEntityOfPage": {
                "@type": "WebPage",
                "url": "https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/68-semitool"
            },
            "publisher": {
                "@id": "https://www.potomacelectric.com/repairs/#defaultPublisher"
            },
            "url": "https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/68-semitool"
        },
        {
            "@type": "Person",
            "name": "Administrator",
            "@id": "https://www.potomacelectric.com/repairs/#administrator_33031ba873"
        },
        {
            "@id": "https://www.potomacelectric.com/repairs/#defaultPublisher",
            "@type": "Organization",
            "url": "https://www.potomacelectric.com/repairs/",
            "logo": {
                "@id": "https://www.potomacelectric.com/repairs/#defaultLogo"
            },
            "name": "potomacelectric"
        },
        {
            "@id": "https://www.potomacelectric.com/repairs/#defaultLogo",
            "@type": "ImageObject",
            "url": "",
            "width": "",
            "height": ""
        }
    ]
}
```

<!-- AI:SCHEMA:END -->

