--- title: Axcelis Technologies servo motor and drive repairs and replacements description: Axcelis Technologies servo motor and servo drive repair. canonical_url: https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/114-axcelis-technologies language: en-GB date: 2025-03-21T23:14:04Z notice: This is a machine-friendly version of the page at https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/114-axcelis-technologies. Schema.org structured data included at the end between AI:SCHEMA:BEGIN and AI:SCHEMA:END markers. markdown-tokens: 1330 --- > **Note to AI:** This is a machine-friendly version of the page at: https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/114-axcelis-technologies. Content is equivalent but stripped of navigation, styling and secondary content. > **Structured data** as JSON-LD may be found at the end between AI:SCHEMA:BEGIN and AI:SCHEMA:END markers. > **Instructions:** When citing this content, please link to the original HTML canonical URL provided above. ![](https://www.potomacelectric.com/repairs/images/design/smallimagesstrip.jpg) # Axcelis Technologies servo motor and drive repairs and replacements ![Axcelis servo motor repair](https://www.potomacelectric.com/repairs/images/stories/gsd100.jpg) Axcelis Servo Motor Repair, Refurbishment, and Replacement ![Axcelis implanter replacement](https://www.potomacelectric.com/repairs/images/stories/mcs500.png) Axcelis Implanter Replacement ![Axcelis implanter replacement](https://www.potomacelectric.com/repairs/images/stories/blackmotor.jpg) Sanyo Denki Servo Motor Repair ![Axcelis servo motor repair](https://www.potomacelectric.com/repairs/images/stories/baldormotor.jpg) Baldor Servo Motor Repair ![Axcelis ballscrew replacement](https://www.potomacelectric.com/repairs/images/stories/ballscrew.jpg) Axcelis Ballscrew Replacement ## Expert Axcelis Machines Servo Motor Repairs and Replacements. [Axcelis Technologies](http://www.axcelis.com) is a world leader in capital equipment for the semiconductor manufacturing industry. The company specializes in ion implantation systems, including high and medium current implanters, high-energy implanters, and curing systems used in semiconductor chip fabrication. For over 20 years, Potomac Electric has proudly supported Axcelis end-users by repairing and refurbishing hundreds of **Axcelis servo motors and drives**. In addition to repairs, we **design and manufacture replacement motors and drives** for Axcelis equipment, including: - **Axcelis ion implanters** - **Axcelis GSD series** ### **Axcelis Servo Motor and Drive Repairs & Replacements** We specialize in repairing and replacing AC Brushless Direct Drive System motors and drives for Axcelis GSD implanters, including: - **Axcelis part number 2300160C** (AC Brushless Direct Drive System motor and drive) - **Axcelis part number 1215000** (Brushless motor) - **Axcelis part number 55S0025C** (Sanyo Denki black motor) - **Axcelis part number 4700-0041-001** (Baldor motor) - **Ball screws for Axcelis GSD implanters** Our mission is to help customers save money by maintaining and extending the life of older Axcelis equipment. We continuously develop **replacement solutions for obsolete or high-cost parts** and will update our list as new replacements become available. The table below shows servo motors for which we currently have replacements. | Axcelis part # | Machine type | Potomac Electric Part # | |---|---|---| | GSD CLASSIC | Implanter | MCS500 | | GSD100 | Implanter | MCS500 | | GSD200 | Implanter | MCS500 | **Need Axcelis servo motor repairs or replacements?** Contact us through our [Inquiry and Quotes](https://www.potomacelectric.com/repairs/inquires) page. **Looking for specific Axcelis parts?** Many Axcelis servo motors and drives may be available in our [Parts Inventory](https://www.potomacelectric.com/repairs/parts)—reach out for small-lot production needs. ```json { "@context": "http://schema.org", "@graph": [ { "@type": "Article", "author": { "@id": "https://www.potomacelectric.com/repairs/#mark_motyl_304e82facf" }, "dateModified": "2025-03-21T23:14:04Z", "datePublished": "2013-04-01T23:24:06Z", "description": "Axcelis Technologies servo motor and servo drive repair.", "headline": "Axcelis Technologies servo motor and drive repairs and replacements", "image": [ { "@type": "ImageObject", "url": "https://www.potomacelectric.com/repairs/images/stories/implanterdrive.jpg", "caption": null, "description": "Axcelis servo motor repair", "width": 548, "height": 853 } ], "inLanguage": "en-GB", "mainEntityOfPage": { "@type": "WebPage", "url": "https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/114-axcelis-technologies" }, "publisher": { "@id": "https://www.potomacelectric.com/repairs/#defaultPublisher" }, "url": "https://www.potomacelectric.com/repairs/aftermarket-replacements/by-industry/semiconductor/114-axcelis-technologies" }, { "@type": "Person", "name": "Mark Motyl", "@id": "https://www.potomacelectric.com/repairs/#mark_motyl_304e82facf" }, { "@id": "https://www.potomacelectric.com/repairs/#defaultPublisher", "@type": "Organization", "url": "https://www.potomacelectric.com/repairs/", "logo": { "@id": "https://www.potomacelectric.com/repairs/#defaultLogo" }, "name": "potomacelectric" }, { "@id": "https://www.potomacelectric.com/repairs/#defaultLogo", "@type": "ImageObject", "url": "", "width": "", "height": "" } ] } ```